가스질량유량계 Mass Flow Controller (Multi gas selectable)

Mass Flow Controller(Multi gas selectable)

• Accessible PID valve tuning for best speed and stability.
• Custom valve orifice sizes: yields full-range stability.
• Control mass flow, vol. flow or pressure with one device.
• No warm-up: ready to control process flows in one second.

 

제품명	가스질량유량계 Mass Flow Controller (Multi gas selectable)
Model	MC Series	MCS Series	MCV Series
Type	General	For Toxi Gas	For Vacuum
Flow Range	0 ~ 1 slpm / 0 ~ 5 slpm
Mass Flow Accuracy at calibration conditions	±0.6% of reading or ±0.1% of full scale	±0.8% of reading or ±0.2% of full scale
Operating Temperature Range	-10 to +60°C
Temperature Accuracy	±0.75°C
Operating Pressure full scale	145 PSIG
Pressure Accuracy	Above 1 atm: ±0.5% of reading
Typical Indication Response Time	< 10 ms	< 100 ms
Typical Warm-Up Time	<1 Second
Monochrome LCD	Simultaneously displays mass Flow, pressure and temperature	Simultaneously displays mass Flow, Volumetric Flow, pressure and temperature
Mechanical Dimensions (HxWxD)	104.14x91.44x27.94mm / 4.1x3.6x1.1"		121.92x172.72x38.1mm /4.8x6.8x1.5"
Gas Selectable	98 Gas	128 Gas	98 Gas
Communication	RS-232